Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018"сборник

Статьи, опубликованные в сборнике

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• • 2018 Comparative study of the dependence of line edge roughness of resists patterns on its molecular structure
  • Sharapov A., Baranov G., Shishlyannikov A., Tatarintsev A.A., Gushin O., Rudenko K.V.
  • в сборнике Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018", место издания Maks press Moscow, тезисы, с. 178-178
• • 2018 Determination of Al content in Al/Si thermomigration fabricated structures by X-ray diffraction
  • Lomov A., Belov A.Yu, Seredin B., Tatarintsev A., Simakin S.
  • в сборнике Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018", место издания Maks press Moscow, тезисы, с. 139-139
• • 2018 E-beam lithography of dense 10 nm line/space pattern using the HSQ mask
  • Tatarintsev A.A., Miakonkikh A.V., Rudenko K.V., Shishlyannikov A.
  • в сборнике Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018", место издания Maks press Moscow, тезисы, с. 48-48
• • 2018 Fabrication and properties of SOI-based planar silicon nanowire arrays
  • Rogozhin A., Miakonkikh A., Tatarintsev A.A., Rudenko K.V.
  • в сборнике Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018", место издания Maks press Moscow, тезисы, с. 196-196
• • 2018 Features of ferroelectric charging process and switching of the domains under electron beam irradiation
  • Tatarintsev A.A., Rau E.I., Markovets K.E.
  • в сборнике Proceedings of the Inernational Conference "Micro- and Nanoelectronics - 2018", место издания Maks press Moscow, тезисы, с. 166-166