IPAC 2021. Abstracts of the 12th International Particle Accelerator Conferenceсборник
Статьи, опубликованные в сборнике
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2021
Carbon Beam at I-3 Injector for Semiconductor Implantation
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Losev A.A.,
Alekseev P.N.,
Alekseev N.N.,
Kulevoy T.V.,
Milyachenko A.D.,
Satov Yu A.,
Shumshurov A.V.,
Lagov P.B.,
Letovaltseva M.E.,
Pavlov Yu S.
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в сборнике IPAC 2021. Abstracts of the 12th International Particle Accelerator Conference, серия International Particle Accelerator Conference, место издания Brazilian Center for Research in Energy and Materials (LNLS/CNPEM) Campinas, SP, Brazil, тезисы, с. 170-170