19-th V.A. Fock Meeting on Theoretical, Quantum and Computational ChemistryКонференция
Доклады:
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2023
Building a digital twin of an ICP-CVD process
(Устный)
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Авторы:
Garifullin K.Z.,
Mezentsev I.A.,
Losev T.V.,
Bashirov I.I.,
Salimov R.G.,
Klikushin A.S.,
Podryabinkin E.V.,
Malyshev V.I.,
Chaliy V.A.,
Novikov I.S.,
Shapeev A.V.,
Medvedev M.G.