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A novel fast, easily processable and highly reproducible approach to oligothiophene-based monolayer OFETs fabrication by Langmuir-Blodgett and Langmuir-Schaefer techniques was developed and successfully applied. It is based on self-assembly of organosilicon derivatives of oligothiophenes on the water-air interface. Influence of the conjugation length and the anchor group chemistry of the self-assembling molecules on the monolayer structure and electric performance of monolayer OFETs was systematically investigated. The efficient monolayer OFETs with the charge carrier mobilities up to 0.01 cm2/Vs and on/off ratio up to 106 were fabricated and their functionality in integrated circuits under normal air conditions was demonstrated.