ИСТИНА

Direct current plasma-enhanced chemical vapor deposition (CVD) technique was developed to produce thin film materials by condensation of carbon from hydrogen-methane gas mixture. A particular feature of the CVD processes consists in ability to produce different types of diamond and graphitic materials with structural peculiarities in nanometer and micrometer length scale. Comprehensive study of the CVD films was performed by using Raman scattering, scanning and transmission electron microscopy methods. Potential applications of such carbon materials are discussed. Moreover, a quick spectroscopic method for rotational temperature determination based on the low-resolution emission spectrum of the C2 (v′=0→v″=0) vibronic band profile of Swan system is introduced. The molecular dimers of C2 are assumed to be building blocks for the carbon structures. The developed method is based on machine learning algorithms and was applied to determine molecular gas temperature in DC glow discharge during plasma-enhanced CVD of carbon film materials. Maps of the spatial temperature distributions of the gas subsystems and free electrons of the plasma object (from which carbon materials are formed) are presented. Patterns and relationships between spatial maps of plasma parameters and the resulting unique materials is discussed. The work was supported by RSF project 19-79-00203.