ИСТИНА

Zoom, 10min We present results of optical emission spectroscopy study of a plasma enhanced chemical vapor deposition of carbon films. The materials produced in this study were the diamond films, containing the pyramidal diamond crystallites [1], and the films, consisting of vertically oriented carbon nanowalls [2]. These carbon films were deposited from a hydrogen and methane gas mixture activated by a direct current discharge. The optical emission spectra were recorded for different areas of the discharge plasma to provide a spatial mapping the gas-phase species concentrations, electron and gas temperatures. Random Forest algorithm of machine learning was explored for determination of temperature distribution maps [3]. The obtained results are used for optimization of the deposition process and for developing the mechanisms explaining formation of the carbon materials with different properties. The work was supported by RSF #19-79-00203 and by RFBR #18-29-19071 (CVD, Optical parts and Si purchase). [1] Malykhin S., Mindarava Y., Ismagilov R., Orekhov A., Jelezko F., Obraztsov A. (2019). physica status solidi (b), 256(9), 1800721 [2] Kleshch V. I., Bandurin D. A., Serbun P., Ismagilov R. R., Lützenkirchen‐Hecht D., Müller G., Obraztsov A. N. (2018), physica status solidi (b), 255(1), 1700270. [3] Ismagilov R. R., Kudarenko I. P., Malykhin S. A., Babin S. D., Loginov A. B., Kleshch V. I., Obraztsov A. N. (2020). arXiv preprint arXiv:2011.12647.