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Due to different magnetic effects in Iron Oxide films such as spin-polarization of electrons in magnetite (Fe3O4), magnetoelectric properties in hematite (Fe2O3) and antiferromanetic properties of wustite (FeO) they have potential application in spintronics, мagnetoelectricity and high density memory devices [1,2]. Moreover, we suppose Iron Oxide coatings obtained on hexagonal oriented porous media can show chirality of magnetic structure. It should be noted that the manifestation of properties mentioned above strongly connected to the thickness of coatings, their electronic and local atomic structure. In this work for obtaining of Iron Oxide coatings on the surface of porous alumina we propose magnetron deposition technique of Iron followed by thermal annealing in oxygen atmosphere. Porous alumina templates were obtained by anodization process of aluminum foil. The aim of this work was to get closer to the understanding the mechanism of formation of Iron Oxide by XPS profiling in binding to SEM image of cross section and reveal the chemical state of Iron Oxide in the surface, film volume and interface near the porous alumina surface.