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We discuss two ways to improve the accuracy of LEIS by accounting/calculating alkali metal ion neutralization. The first one is the correction of the reference samples method results, which accounts ion neutralization. Such correction can be done by using available experimental data or by calculating the neutralization probability. The second option is the direct calculation of the elemental sensitivity factors, which consists of calculation of scattering cross section by means of binary collision model and calculation of the neutralization probability. Despite the scope of direct calculation of the elemental sensitivity factors is limited to relatively simple surfaces nowadays, in some cases, e.g. for metallic compounds, this method allows to reduce the number of experimental measurements by at least three times. As the next step we are going to extend our theoretical method to calculate the neutralization probability and the elemental sensitivity factors of alkali metal ions on metallic surfaces with adsorbates.