Аннотация:Experimental studies of inelastic interaction of low-energy Ar+ ions (100-2000 eV) with ZrO2 surface are presented. The studies were performed by means of Auger spectroscopy, secondary ion mass spectroscopy and ion surface scattering. The oscillating dependence of the surface stoichiometry change and Zr ion yield on the incident Ar ion energy was found. The Zr ion yield and the scattered Ar ion intensity were oscillated in antiphase. The results are interpreted in terms of the quasi-resonant charge-exchange model.