Аннотация:The small-size energy analyzer is installed on mass spectrometer instead of source and enables to study atom/electron and ion/electron emission from various materials. The measurement parameters were the following: intensity of bombarding beam ≈0.1 μamp, beam diameter 2 mm. The energy of bombarding particles varied in the range of 2-8 kev. The particles spread by kinetic energy didn’t exceed some electron-volts. The analyzer resolution is ≈100.