Studies of N-Doped p-ZnO Layers Grown on c-Sapphire by Radical Source Molecular Beam Epitaxyстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:We report on the fabrication of p-type ZnO:N layers using radical-source molecular beam epitaxy and post-growth annealing of the samples. Plasma-activated oxygen and nitrogen fluxes are supplied via a single plasma cell. The combination of low growth temperature (350 - 400 degrees C), slightly O-rich conditions, and post-growth annealing in the range of 650 - 800 degrees C results in efficient nitrogen p-doping with Hall hole concentration 3 x 10(17) cm(-3). The details of the structural and the electrical characterizations of the films are discussed.