Sensor Properties of Pd-Doped SnO2 Films Deposited by Laser Ablationстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:Polycrystalline SnO2 and SnO2<Cu> films were surface-doped with palladium using laser ablation. The effect of the energy density of pulsed KrF laser radiation on the plasma generation process and Pd deposition rate was studied, and the depth profiles of Pd in the films were determined. The gas response of the Pd/SnO2 , SnO2<Cu>, and Pd/SnO2<Cu> films was studied between 200 and 380°C using a mixture of 1 vol % H2 with N2 . Surface doping with Pd was found to enhance the hydrogen sensitivity of SnO2<Cu> by two orders of magnitude.