Deposition of polycrystalline SnO2:CuO films by laser ablationстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:Pure and copper-doped tin dioxide films were prepared by pulsed laser ablation of metallic targets, followed by oxidation. The optimal deposition and oxidation conditions were found. The composition of the metallic and oxidized films was determined by Auger electron spectroscopy and ICP emission spectrometry. Structural characterization;vas performed by x-ray diffraction. Scanning electron microscopy, x-ray diffraction, and high-temperature optical microscopy data demonstrate that the microstructure of the films depends on laser-beam power density as well as on substrate temperature. Most uniform grain-size distributions were obtained at substrate temperatures from 50 to 70 and from 280 to 300 degrees C. The copper dopant has no effect on film microstructure. Long-term oxidizing annealing leads to copper enrichment in the near-surface region.