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Surface Defects Investigation Using Fictitious Particles and Discrete Sources Methodтезисы доклада
- Автор: Eremin Yu A.
- Сборник: Proceedings of the Workshop Scattering by aggregates (on surfaces)
- Тезисы
- Год издания: 2014
- Место издания: Institut für Werkstofftechnik Bremen, Germany Bremen
- Первая страница: 42
- Последняя страница: 44
- Аннотация: Discrete Sources Method (DSM) has been applied to investigate polarized light scattering by nano-dimensional line bump and line pit located at a substrate surface. These defects are modeled in the frame of unitary mathematical model of “fictitious particle” embedded into a substrate. Distribution of the scattered intensity at a unite hemi-sphere and collector responses have been examined versus the bump/pit orientation
- Добавил в систему: Еремин Юрий Александрович