Synthesis of Carbon Films by Magnetron Sputtering of a Graphite Target using Hydrogen as Plasma-Forming Gasстатья
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Дата последнего поиска статьи во внешних источниках: 5 сентября 2016 г.
Аннотация:During magnetron sputtering of graphite using hydrogen as plasma-forming gas, a material sputtered from the target deposited only on heated substrates. When using current-heated Ni-Fe foils as substrates, carbon deposits of different crystal structures were obtained. The conditions for growing single-crystal graphite layers and single- and multilayer graphenes are found by analyzing deposits by Raman scattering.