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FeZrN films: Role of dc magnetron sputtering conditions in the formation of their elemental and phase compositionsстатья Исследовательская статья
- Авторы: Sheftel E.N., Tedzhetov V.A., Harin E.V., Usmanova G.Sh, Dyachkov A.L.
- Журнал: Thin Solid Films
- Год издания: 2020
- Издательство: Elsevier Sequoia
- Местоположение издательства: Switzerland
- DOI: 10.1016/j.tsf.2020.137876
- Аннотация: The phase-structural state of Fe, Fe(1-x)Nx, Fe(1-y)Zry, and Fe(90-z)Zr10Nz films obtained by reactive magnetron sputtering under different energy and gas-atmosphere conditions was studied. It is shown that impurity elements (N, O) absorbed by the films during the deposition process along with the principal elements (Fe, Zr, N) participate in the formation of the phase composition and structure of the films. The phenomena of the formation of supersaturated bcc Fe(N) and/or bcc Fe(Zr) solid solutions and high-temperature modifications (which are non-equilibrium at room temperature) of the bcc Zr and fcc ZrO2 phases in the films are substantiated by the fundamental concepts of the metal physics.
- Добавил в систему: Харин Евгений Васильевич
Прикрепленные файлы
| № | Имя | Описание | Имя файла | Размер | Добавлен |
|---|---|---|---|---|---|
| 1. | Полный текст | Thin_Solid_Films_698_2020_137876.pdf | 2,0 МБ | 29 января 2022 [harin-eugene@ya.ru] |