Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodesстатья
Исследовательская статья
Информация о цитировании статьи получена из
Web of Science ,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 17 июня 2020 г.
Авторы:
Djuzhev N.A. ,
Demin G.D. ,
Filippov N.A. ,
Evsikov I.D. ,
Glagolev P.Yu ,
Makhiboroda M.A. ,
Chkhalo N.I. ,
Salashchenko N.N. ,
Filippov S.V. ,
Kolosko A.G. ,
Popov E.O. ,
Bespalov V.A.
Журнал:
Technical Physics
Том:
64
Номер:
12
Год издания:
2019
Издательство:
Maik Nauka/Interperiodica Publishing
Местоположение издательства:
Russian Federation
Первая страница:
1742
Последняя страница:
1748
DOI:
10.1134/S1063784219120053
Аннотация:
Abstract: The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation. © 2019, Pleiades Publishing, Ltd.
Добавил в систему:
Демин Глеб Дмитриевич