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Mechanical Stresses Analysis of Thin Round Membranes in the Case of Large Deflectionsстатья Исследовательская статья
Информация о цитировании статьи получена из
Scopus
Дата последнего поиска статьи во внешних источниках: 11 ноября 2020 г.
- Авторы: Dedkova A.A., Glagolev P.Yu, Demin G.D., Gusev E.E., Skvortsov P.A.
- Сборник: Proceedings of the 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus)
- Год издания: 2020
- Место издания: St. Petersburg Electrotechnical University “LETI” Saint Petersburg
- Первая страница: 2288
- Последняя страница: 2292
- DOI: 10.1109/EIConRus49466.2020.9039289
- Аннотация: An analysis of the methods for calculating the dependence of the deflection of multilayer round membranes on the applied overpressure was carried out. To compare theoretical calculations with experimental data, as an example, we considered a round membrane based on the structure Al/SiO2/Al with a total thickness of 2.5 μm. Using the COMSOL Multiphysics and ANSYS software packages, we calculated the stress distribution in the radial and tangential directions, the distribution of equivalent von Mises stresses over the membrane area, and also compared the obtained numerical values of mechanical stresses with the corresponding analytical estimates. We compared the deflection of the membrane depending on the applied overpressure obtained using software packages, analytical estimates and records obtained experimentally using an optical profilometer. It was shown that, when studying the deflection of membranes, which significantly exceeds the thickness of the membranes, to predict the deformations expected in the experiment, analytical relations obtained taking into account the presence of tensile forces, radial displacement, and elongation of the median plane should be used. © 2020 IEEE.
- Добавил в систему: Демин Глеб Дмитриевич