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Determination of Plasma Density from Data on the Ion Current to Cylindrical and Planar Probesстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 11 марта 2017 г.
- Авторы: Voloshin D.G., Vasileva A.N., Kovalev A.S., Mankelevich Yu A., Rakhimova T.V.
- Журнал: Plasma Physics Reports
- Том: 42
- Номер: 12
- Год издания: 2016
- Издательство: Maik Nauka/Interperiodica Publishing
- Местоположение издательства: Russian Federation
- Первая страница: 1146
- Последняя страница: 1154
- DOI: 10.1134/S1063780X16120096
- Аннотация: To improve probe methods of plasma diagnostics, special probe measurements were performed and numerical models describing ion transport to a probe with allowance for collisions were developed. The current–voltage characteristics of cylindrical and planar probes were measured in an RF capacitive discharge in argon at a frequency of 81 MHz and plasma densities of 1010–1011 cm–3, typical of modern RF reactors. 1D and 2D numerical models based on the particle-in-cell method with Monte Carlo collisions for simulating ion motion and the Boltzmann equilibrium for electrons are developed to describe current collection by a probe. The models were used to find the plasma density from the ion part of the current voltage characteristic, study the effect of ion collisions, and verify simplified approaches to determining the plasma density. A 1D hydrodynamic model of the ion current to a cylindrical probe with allowance for ion collisions is proposed. For a planar probe, a method to determine the plasma density from the averaged numerical results is developed. A comparative analysis of different approaches to calculating the plasma density from the ion current to a probe is performed.
- Добавил в систему: Волошин Дмитрий Григорьевич