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Non-destructive method of surface mapping to improve accuracy of mechanical stresses measurementsстатья
- Авторы: Djuzhev N.A., Gusev E.E., Dedkova A.A., Makhiboroda M.A.
- Сборник: 6TH INTERNATIONAL CONFERENCE: MODERN TECHNOLOGIES FOR NON-DESTRUCTIVE TESTING
- Серия: IOP Conference Series-Materials Science and Engineering
- Том: 289
- Год издания: 2018
- Место издания: IOP PUBLISHING LTD [Djuzhev, N. A.; Gusev, E. E.; Dedkova, A. A.] Natl Res Univ Elect Technol MIET, R&D Ctr MST & BEC, Moscow, Russia. [Makhiboroda, M. A.] Natl Res Univ Elect Technol MIET, NMST, Moscow, Russia
- DOI: 10.1088/1757-899X/289/1/012007
- Аннотация: In this paper, we describe a non-destructive method for determining the mechanical stresses based on the mapping of the sample surface. The method shortens the measurement time. The loading of PC's RAM decreases during measurement process. Determine the area of local surface irregularities. The magnitude of the curvature of the structure estimate over the entire surface of the substrate. This makes it possible to increase the accuracy of the calculation of the magnitude of mechanical stresses using the Stoney formula. The use of the proposed technique increases probability of success of substrates bonding operations and contact lithography.
- Добавил в систему: Дедкова Анна Александровна