Pattern stability in diffraction of light from structures with self-similarity symmetryстатья
Статья опубликована в журнале из списка RSCI Web of Science
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Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 4 февраля 2014 г.
Аннотация:A method for determining the structural features of 1D–3D aperiodic diffraction gratings with
self-similarity symmetry has been proposed and substantiated. This method is based on the analysis of
local patterns in scaling characteristics of diffracted waves. The stability of patterns to changes in grating illumination conditions and the presence of defects in gratings is estimated.