Point defect creation by proton and carbon irradiation of α-Ga2O3

Polyakov, A.Y.; Nikolaev, V.I.; Meshkov, I.N.; Siemek, K.; Lagov, P.B.; Yakimov, E.B.; Pechnikov, A.I.; Orlov, O.S.; Sidorin, A.A.; Stepanov, S.I.; Shchemerov, I.V.; Vasilev, A.A.; Chernykh, A.V.; Losev, A.A.; Miliachenko, A.D.; Khrisanov, I.A.; Pavlov, Y.S.; Kobets, U.A.; Pearton, S.J.

Авторы: Polyakov Alexander Y., Nikolaev Vladimir I., Meshkov Igor N., Siemek Krzysztof, Lagov Petr B., Yakimov Eugene B., Pechnikov Alexei I., Orlov Oleg S., Sidorin Alexey A., Stepanov Sergey I., Shchemerov Ivan V., Vasilev Anton A., Chernykh Alexey V., Losev Anton A., Miliachenko Alexandr D., Khrisanov Igor A., Pavlov Yu S., Kobets U.A., Pearton Stephen J.
Журнал: Journal of Applied Physics
Том: 132
Номер: 3
Год издания: 2022
Издательство: AIP Publishing
Местоположение издательства: United States
Первая страница: 035701
DOI: 10.1063/5.0100359
Аннотация: Films of α-Ga2O3 grown by Halide Vapor Phase Epitaxy (HVPE) were irradiated with protons at energies of 330, 400, and 460 keV with fluences 6 × 1015 cm−2 and with 7 MeV C4+ ions with a fluence of 1.3 × 1013 cm−2 and characterized by a suite of measurements, including Photoinduced Transient Current Spectroscopy (PICTS), Thermally Stimulated Current (TSC), Microcathodoluminescence (MCL), Capacitance–frequency (C–f), photocapacitance and Admittance Spectroscopy (AS), as well as by Positron Annihilation Spectroscopy (PAS). Proton irradiation creates a conducting layer near the peak of the ion distribution and vacancy defects distribution and introduces deep traps at Ec-0.25, 0.8, and 1.4 eV associated with Ga interstitials, gallium–oxygen divacancies VGa–VO, and oxygen vacancies VO. Similar defects were observed in C implanted samples. The PAS results can also be interpreted by assuming that the observed changes are due to the introduction of VGa and VGa–VO.
Добавил в систему: Павлов Юрий Сергеевич

	ИСТИНА	Войти в систему Регистрация
	ФНКЦ РР
	Главная Поиск Статистика О проекте Помощь

ИСТИНА

ФНКЦ РР

Point defect creation by proton and carbon irradiation of α-Ga2O3статья Исследовательская статья

Прикрепленные файлы