Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Buzaverov, K.A.; Baburin, A.S.; Sergeev, E.V.; Avdeev, S.S.; Lotkov, E.S.; Andronik, M.; Stukalova, V.E.; Baklykov, D.A.; Dyakonov, I.V.; Skryabin, N.N.; Saygin, M.Y.; Kulik, S.P.; Ryzhikov, I.A.; Rodionov, I.A.

Авторы: Buzaverov Kirill A., Baburin Aleksandr S., Sergeev Evgeny V., Avdeev Sergey S., Lotkov Evgeniy S., Andronik Mihail, Stukalova Victoria E., Baklykov Dmitry A., Dyakonov Ivan V., Skryabin Nikolay N., Saygin Mikhail Yu, Kulik Sergey P., Ryzhikov Ilya A., Rodionov Ilya A.
Журнал: Optics Express
Том: 31
Номер: 10
Год издания: 2023
Издательство: Optical Society of America
Местоположение издательства: United States
Первая страница: 16227
Последняя страница: 16242
DOI: 10.1364/OE.477458
Аннотация: Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology targeting C-band application is well established across multi-project wafer (MPW) fabs, whereas near-infrared (NIR) PICs suitable for the state-of-the-art single-photon sources are still underdeveloped. Here, we report the labs-scale process optimization and optical characterization of low-loss tunable photonic integrated circuits for single-photon applications. We demonstrate the lowest propagation losses to the date (as low as 0.55 dB/cm at 925 nm wavelength) in single-mode silicon nitride submicron waveguides (220×550 nm). This performance is achieved due to advanced e-beam lithography and inductively coupled plasma reactive ion etching steps which yields waveguides vertical sidewalls with down to 0.85 nm sidewall roughness. These results provide a chip-scale low-loss PIC platform that could be even further improved with high quality SiO2 cladding, chemical-mechanical polishing and multistep annealing for extra-strict single-photon applications.
Добавил в систему: Сайгин Михаил Юрьевич

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Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidthстатья Исследовательская статья

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