Temperature Evolution of Organosilicate Glass Films with Organic Bridges

Vishnevskiy, S.; Seregin, D.S.; Palov, A.P.; Orlov, G.A.; Yakushev, V.A.; Ovchinnikov, I.S.; Vorotilov, K.A.; Baklanov, M.R.

Авторы: Vishnevskiy S., Seregin D.S., Palov A.P., Orlov G.A., Yakushev V.A., Ovchinnikov I.S., Vorotilov K.A., Baklanov M.R.
Журнал: Microporous and Mesoporous Materials
Том: 363
Год издания: 2023
Издательство: Elsevier BV
Местоположение издательства: Netherlands
Номер статьи: 112783
DOI: 10.1016/j.micromeso.2023.112783
Аннотация: Thin porous sol–gel organosilicate glass (OSG) films containing methylene (Me-OSG),ethylene (Et-OSG), or phenylene (Ph-OSG) bridges between Si atoms, along with terminalmethyl groups, were spin-coated onto Si wafers. Porosity was generated using the Brij® L4template. The investigation focused on examining the effects of annealing (200–1000 °C, 30min) on the properties of the micro/mesoporous films. The changes in the properties of the filmsduring the annealing process at different temperatures are impacted by the evaporation ofsolvents, condensation reactions, and destruction of the porogen (200–400 °C). Additionally, thedegradation of terminal and bridging organic groups has been observed to occur within thetemperature range of 200–600 °C. Finally, the films undergo densification through subsequentcondensation and viscous sintering within a temperature range of 700 to 1000 °C. Ph-OSG filmsdemonstrate remarkable resistance to temperatures of ~400 °C. Additionally, these films exhibitthe highest Young’s Modulus (YM) and the smallest pore radius (YM ≈ 6.7 GPa and R ≈ 1 nmafter 400 °C annealing). It is important to acknowledge that these materials exhibit a relativelyhydrophilic nature, significant shrinkage, and higher refractive index (RI) and dielectricconstant (k) compared to the Me-OSG and Et-OSG films. Me-OSG films demonstrate thehighest hydrophobicity and porosity, along with minimal shrinkage, RI, and k. However, theyalso possess the largest pore radius (R = 1.7–2.2 nm after undergoing annealing at 400–550 °C).Modeling the concentrations of different species reveals that the predicted changes inconcentrations are strongly dependent on the number of hydroxyl groups present on the surfaceof the pore walls. The decrease in the number and/or polarizability of OH groups leads to anincreased impact of other species on the dielectric constant, resulting in higher computed values
Добавил в систему: Палов Александр Петрович

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Temperature Evolution of Organosilicate Glass Films with Organic Bridgesстатья

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