Аннотация:The velocity distribution of the different size particles of the erosive laser plume at the Sitarget ablation have been measured experimentally. The influence of the mechanical separationmethod on the Si films surface quality and their inhomogeneity have been investigated. The Si thinfilms have been received by the pulse laser deposition (PLD) method. It was established that themechanical separation method allows to exclude the hit of Si drops on the film in the depositionprocess