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Recognition of rectangular reference labels formed by nanolithographyстатья
Информация о цитировании статьи получена из
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 15 мая 2024 г.
- Автор: Gulyaev P.V.
- Журнал: AIP Conference Proceedings
- Том: 3021
- Год издания: 2024
- Первая страница: 060003-1
- Последняя страница: 060003-6
- Номер статьи: 060003
- DOI: 10.1063/5.0193053
- Аннотация: The article is devoted to the recognition of rectangular reference labels used to identify the investigated area in scanning probe microscopy. The technology of forming such labels using contact and semi-contact nanolithography is presented. Typical images of continuous and clustered reference labels are given. It is shown that the skeletons of continuous reference labels can have discontinuities. Therefore, the use of clustered reference labels consisting of separate imprints tightly adjacent to each other is recommended. An algorithm for recognizing rectangular reference labels partially or completely presented in the images is described. The algorithm is based on the use of a surface curvature detector that picks out segments of the label skeleton. To recognize reference labels, it is proposed to use statistical data characterizing the distribution of the mutual rotation angles of the detected segments. The results confirming the efficiency of the proposed recognition method are presented using partial and complete images of rectangular reference labels.
- Добавил в систему: Гуляев Павел Валентинович