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The angular-distribution of material sputtered from agau and cupt by20-80kev argonстатья
Информация о цитировании статьи получена из
Web of Science
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 27 мая 2015 г.
- Авторы: Andersen H.H., Chevallier J., Chernysh V.S.
- Журнал: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
- Том: 191
- Номер: 1-3
- Год издания: 1981
- Издательство: Elsevier BV
- Местоположение издательства: Netherlands
- Первая страница: 241
- Последняя страница: 244
- DOI: 10.1016/0029-554X(81)91010-7
- Аннотация: The material sputtered by 20–80 keV argon from films of AgAu and CuPt has been collected on a semicircular aluminum collector. The elemental composition of the sputtered material was determined through the Rutherford scattering of 2 MeV α particles. To ensure a sufficient amount of collected material, irradiation doses were substantially larger than those at which the total sputtered flux had attained a stoichiometric composition. In spite of the fact that the AgAu targets showed a strong crystalline texture while the CuPt targets consisted of fine-grained random polycrystalline materials, the two targets displayed close similarities in the angular distribution of the ratio between light and heavy elements. Material sputtered further than 70° away from the normal could not be measured, but within the investigated region, the composition of the collected material never deviated by more than 15% from the average composition of the sputtered flux.
- Добавил в систему: Черныш Владимир Савельевич