Аннотация:The electrochemical characteristics of solid-state thin-film lithium-ion batteries with two differentstructures: Ti/Anode/LiPON/LiCoO2/Ti (with an anode) and Ti/LiPON/LiCoO2/Ti (anode-free) areintercompared. Si@O@Al composite anode with thicknesses of 154 and 15 nm, as well as pre-lithiated LixSi@O@Al composite with a thickness of 192 nm, were used as anodes. In anode-free batteries, the lithium anode was formed by the in-situ method. Batteries with 154 nm-thick Si@O@Al and LixSi@O@Al anodes have good cyclability due to their moderate volume change during lithium-ion insertion/extraction and reliable adhesionto the LiPON solid electrolyte. These batteries are promising in terms of high energy density due to the lithium anode in-situ formation, although they have poor cycling performance due to peeling of the upper current collector.The introducing of a ~15 nm thick Si@O@Al layer between the LiPON and the current collector allows maintaining the high energy density inherent in the batteries with lithium anodes and improving their cyclability.