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A process of nanomachining a nanoporous anodized aluminum oxide by chemical photolithography for sensor applicationsтезисы доклада
- Авторы: Boytsova O.V., Roslyakov I.V., Klimenko A.A., Napolskii K.S., Lukashin A.V.
- Сборник: Abstracts of 4th International Conference on Nano-structures SElf-assembly (NANOSEA2012) ), 25-29 June, 2012, St. Margherita di Pula, Italy
- Тезисы
- Год издания: 2014
- Место издания: Rome
- Первая страница: 97
- Аннотация: The objective of this work is to study the approach to influence and modification of form surface using advanced lithographic methods. This technique can be used as an alternative to plasma-based etching of Al for applications, in which economical benefits overcome technological limitations.
- Добавил в систему: Бойцова Ольга Владимировна