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Статьи в журналах
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- 2016 Silicon ohmic lateral-contact MEMS switch for RF applications
- Rogozhin A., Miakonkikh A., Tatarintsev A., Lebedev K., Kalnov V., Rudenko K., Lukichev V.
- в журнале Proc. SPIE, International Conference on Micro- and Nano-Electronics 2016, том 10224, с. 1022419-1-1022419-7 DOI
Тезисы докладов
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- 2014 Impact of structural changes in e-beam negative resist hydrogen silsesquioxane (HSQ) to ecth-resistance at different doses of exposure
- Ivanenko I.P., Kalnov V.A., Miakonkikh A.V., Orlikovsky N.A., Tatarintsev A.A.
- в сборнике International Conference "Micro- and Nanoelectronics - 2014". Book of abstracts, место издания Moscow-Zvenigorod, Russia, тезисы, с. O1-13