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Статьи в журналах
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- 2010 Simulation of scanning electron microscope images taking into account local and global electromagnetic fields
- Babin S., Borisov S., Ito H., Ivanchikov A., Suzuki M.
- в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 28, с. C6C41
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- 2008 CHARIOT: software tool for modeling SEM signal and e-beam lithography
- Babin S., Borisov S., Ivanchikov A.
- в журнале Physics procedia, издательство Elsevier (United States), том 1, № 1, с. 305-313
Статьи в сборниках
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- 2010 Comprehensive simulation of SEM images taking into account local and global electromagnetic fields
- Babin Sergey, Borisov Sergey S., Ito Hiroyuki, Ivanchikov Andrei, Matison Dmitri, Militsin Vladimir, Suzuki Makoto
- в сборнике Proceedings of SPIE - The International Society for Optical Engineering, с. 77290W-77290W-6