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Статьи в сборниках
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- 2010 Comprehensive simulation of SEM images taking into account local and global electromagnetic fields
- Babin Sergey, Borisov Sergey S., Ito Hiroyuki, Ivanchikov Andrei, Matison Dmitri, Militsin Vladimir, Suzuki Makoto
- в сборнике Proceedings of SPIE - The International Society for Optical Engineering, с. 77290W-77290W-6