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Статьи в журналах
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- 2022 Effect of H atoms and UV wideband radiation on cured low-k OSG films
- Lopaev Dmitry, Zotovich Alexey, Zyryanov S.M., Bogdanova Maria, Rakhimova T.V., Mankelevich Yu A., Novikova N.N., Seregin Dmitry S., Vishnevskiy Alexey, Vorotilov Konstantin, Shi Xiaoping, Baklanov Mikhail
- в журнале Journal of Physics D - Applied Physics, издательство IOP Publishing ([Bristol, UK], England), том 55, № 25, с. 255206 DOI