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Статьи в журналах
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- 2022 The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates
- Nikolaev Ivan V., Geydt Pavel V., Korobeishchikov Nikolay G., Kapishnikov Aleksandr V., Volodin Vladimir A., Azarov Ivan A., Strunin Vladimir I., Gerasimov Evgeny Y.
- в журнале Nanomaterials, издательство MDPI (Basel, Switzerland), том 12, № 4, с. 670 DOI