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Статьи в сборниках
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- 2019 Optimized Design of the MEMS-Based Three-Axis Thermal Accelerometer for Its Better Performance in a Wide Measurement Range
- Ovodov A.I., Demin G.D., Djuzhev N.A., Makhiboroda M.A.
- в сборнике SAS 2019 - 2019 IEEE Sensors Applications Symposium, Conference Proceedings, издательство Institute of Electrical and Electronics Engineers (Piscataway, NJ, United States)
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- 2018 Peculiarities of the influence of nanostructuring of [SiO2/Si3N4]n multilayer membranes on its thermal and mechanical properties
- Glagolev P.Y., Ovodov A.I., Demin G.D., Djuzhev N.A., Nezhentsev A.V.
- в сборнике Proceedings of the 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2018, с. 1984-1988 DOI
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- 2018 An experimental study on MEMS-based gas flow sensor for wide range flow measurements
- Djuzhev N.A., Novikov D.V., Demin G.D., Ovodov A.I., Ryabov V.T.
- в сборнике SAS 2018 - Proceedings, издательство Institute of Electrical and Electronics Engineers (Piscataway, NJ, United States), с. 1-4
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- 2018 Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers
- Djuzhev N.A., Lapshin R.V., Belin A.M., Ovodov A.I., Novikov D.V., Demin G.D.
- в сборнике Proceedings of the International Conference “Micro- and Nanoelectronics – 2018” (ICMNE-2018), место издания SPIE, том 11022, с. 94