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Тезисы докладов
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- 2014 Experimental and computational thickness determination of ultra-thin surface films using backscattered electrons spectra in SEM
- Kupreenko S., Orlikovsky N., Rau E., Tagachenkov A., Tatarintsev A.
- в сборнике International Conference "Micro- and Nanoelectronics - 2014". Book of abstracts, место издания Moscow-Zvenigorod, Russia, тезисы, с. P1-30-P1-30
Доклады на научных конференциях
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- 2014 Experimental and computational thickness determination of ultra-thin surface films using backscattered electrons spectra in SEM. (Стендовый)
- Авторы: Kupreenko S., Orlikovsky N., Rau E., Tagachenkov A., Tatarintsev A.
- International conference «Micro- and Nanoelectronics - 2014» (ICMNE-2014), Moscow-Zvenigirod, Russia, Россия, 2014