Proceedings of the International Conference "Micro- and Nanoelectronics – 2023" (ICMNE–2023), 2–6 October 2023, Мoscow–Zvenigorod, Russia. Book of Abstractsсборник

Статьи, опубликованные в сборнике

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• • 2023 Study of topographic features, shape, and mechanical stresses in microelectronic structures using geomorphometric techniques
  • Dedkova A., Florinsky I.
  • в сборнике Proceedings of the International Conference "Micro- and Nanoelectronics – 2023" (ICMNE–2023), 2–6 October 2023, Мoscow–Zvenigorod, Russia. Book of Abstracts, место издания Maks Press Мoscow, тезисы, с. 144-144
• • 2023 Technological approaches for formation of high-density integral capacitors: deep etching and atomic layer deposition
  • Miakonkikh A., Pankratov S., Kuzmenko V., Rudenko K.
  • в сборнике Proceedings of the International Conference "Micro- and Nanoelectronics – 2023" (ICMNE–2023), 2–6 October 2023, Мoscow–Zvenigorod, Russia. Book of Abstracts, место издания Maks Press Мoscow, тезисы, с. 43-43
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  • 2023 The effect of Ar+ plasma immersion ion implantation on the electroforming voltage of HfO2-based structures
  • Permyakova O., Zvonov P., Pankratov S., Miakonkikh A., Rogozhin A.E.
  • в сборнике Proceedings of the International Conference "Micro- and Nanoelectronics – 2023" (ICMNE–2023), 2–6 October 2023, Мoscow–Zvenigorod, Russia. Book of Abstracts, место издания Maks Press Мoscow, тезисы, с. 26-26